JPH03119483U - - Google Patents
Info
- Publication number
- JPH03119483U JPH03119483U JP1990025814U JP2581490U JPH03119483U JP H03119483 U JPH03119483 U JP H03119483U JP 1990025814 U JP1990025814 U JP 1990025814U JP 2581490 U JP2581490 U JP 2581490U JP H03119483 U JPH03119483 U JP H03119483U
- Authority
- JP
- Japan
- Prior art keywords
- brush
- substrate
- horizontal
- changed
- whose posture
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004140 cleaning Methods 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 5
- 239000007788 liquid Substances 0.000 claims description 2
Landscapes
- Cleaning In General (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990025814U JPH0725266Y2 (ja) | 1990-03-14 | 1990-03-14 | 基板洗浄装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990025814U JPH0725266Y2 (ja) | 1990-03-14 | 1990-03-14 | 基板洗浄装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03119483U true JPH03119483U (en]) | 1991-12-10 |
| JPH0725266Y2 JPH0725266Y2 (ja) | 1995-06-07 |
Family
ID=31528735
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990025814U Expired - Lifetime JPH0725266Y2 (ja) | 1990-03-14 | 1990-03-14 | 基板洗浄装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0725266Y2 (en]) |
-
1990
- 1990-03-14 JP JP1990025814U patent/JPH0725266Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0725266Y2 (ja) | 1995-06-07 |